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- Wafer skeleton inspection(WS-100)
Wafer skeleton inspection(WS-100)
WS-100
Features:Auto load waferWafer expansionRead wafer IDLoad wafer mapping dataLine-scan cameraSkeleton die inspectionAnalysis and show resultMapping rotation is workable8”←→12” by change kit
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Specification
Inspection Module |
Vision system | Line-scan camera 16K pixel |
Light source | Red light |
Wafer Handling |
Working type | Wafer with frame |
Wafer size capability | 8”; 12” |
Load port | Single 8” ,12” Framed-wafer cassette |
Handling | Gripper / Rail |
System Dimension |
Dimensions (L x W x H) | 1500 mm x 1800 mm x 2000 mm |
Wieght | 1300 Kg |