The ProTec Carrier Systems GmbH can look back on a three decades lasting interdisciplinary development and scientific analyses in the areas of the microelectronic, semiconductor and material science.
The fundamental subject of our company in the past was material and surface technology. An important field of activity has been the refurbishment and the production of new parts for the semiconductor, solar cell and display industry down to the present day. [ Protec ] |
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 ProTec(tor)-Table ProTec PROTEC(TOR)-Table enables manual Transfer-ESC usage for safe and easy handling of thin (< 150μm) and ultra thin (< 50μm) flexible, brittle materials like Si or GaAs wafers, solar cells, flexible displays, etc. With this manual table-top unit Transfer-ESC (refer to Transfer-ESC product information) can be chucked and de-chucked. The table offers semi-automated Transfer-ESC recharge and in combination with the PROTEC(TOR)-Racket the exchange of different Transfer-ESC types. The internal chucking controller offers precise charging with nA-resolution to sufficient clamping conditions. The manual chucking unit is designed for chucking, de-chucking and re-charge of ProTec Transfer-ESC .  PROTEC(TOR)-Racket ProTec¡¯s PROTEC(TOR)-Racket offers safe and easy handling of thin and ultra thin flexible, brittle materials like silicon and GaAs wafers, thin display glasses, thin solar cells etc. The Racket combines functions of a mobile electrostatic chuck (Transfer-ESC) with a mobile handheld charging unit integrated into a handling grip. Operated by just one hand, the Racket features thin material transportation as well as temporary clamping. Even warped device wafers, bumped wafers and taped wafers can be handled. Typical applications for the Racket are macro inspection, thin wafer mounting and hand-over between different mobile carrier technologies. | |||||||||||